Automation without compromise

AXIS NOVA incorporates market leading AXIS technology including coaxial charge compensation, magnetic immersion lens and real time parallel XPS imaging with a new level of fully automated high throughput analysis.

AXIS ULTRA

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Platen navigation without losing sight of your sample

The Nova navigation system allows rapid definition of analysis position for a large number of samples on a platen via the high resolution entry chamber camera. The platen elevator allows automated multi-platen exchange for high sample throughput. Platen transfer to analysis position is simple, secure, and rapid, at the click of a button.

A Si 2p spectrum from a Si wafer with a thin oxide layer acquired in snapshot mode at ~30µm analysis area in a few seconds.

Parallel spectrum acquisition

Parallel imaging enables simultaneous determination of surface chemical composition over a selected field of view. Snapshot mode now allows parallel acquisition of spectra over a selected energy window without scanning the analyser energy. Nova's unique detection system has more than 100 data channels to produce good energy resolution spectra with enough data points to span complex core levels. This mode of acquisition has great time benefits for small analysis areas and in XPS depth profiling.

In the example shown above, an orthogonol optical image of a series of In dots is used to align the fast parallel image of Cr 2p (red) and In 3d (green). The In 3d spectrum was obtained from a l0µm diameter dot using a 7µm analysis area.

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	Copyright © Kratos 2002 Last Update:02/11/12 Kratos Analytical is a wholly owned subsidiary of the Shimadzu Corporation.

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