Scientific Contributions

AS-TuA4
November 5, 2002, 3:00pm, Room C-106
Session: Imaging in Surface Analysis

 

Towards Quantitative Chemical State XPS Imaging

C.J. Blomfield, S. Page, A.J. Roberts, S.J. Hutton, Kratos Analytical Ltd, UK

(presented by C.J. Blomfield)

 

• XPS imaging is an established method for determining the qualitative lateral distribution of chemical species across a sample surface. Early methodologies for this technique involved acquiring XPS maps, where a virtual probe or X-ray spot was scanned across a sample surface and an image built up pixel by pixel as the analysis point was moved across the sample. Other methods involved the parallel detection over a predefined field of view in one specific binding energy range. Improvements in detector and instrument design in general have lead to the development of truly quantitative pulse counting methods which can give high lateral resolution XPS images with quantitative intensities. This paper describes the issues which must be addressed and the applications which could benefit from a quantitative chemical state imaging technique.

  
  

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