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Determination of the structure of HMDSO/O2 plasma deposits using high resolution XPS

 
 
 

Overview Specta ("Figure 3")

 
 
Here we meet the difficulties of displaying the output from VISON's high resolution Sun workstation on a screen only half the resolution whilst still maintaining acceptable quality and information content. WWW graphics formats themsleves are not ideal for this - when the ISO ESCA data transfer format, MIME type, and a suitable Java applet are sorted out though ...
Till then please bear with these approximations: three different "conversion" methods have been used (intentionally) for these figures; one maintaining color at the expense of some "blurring", one maintaining pixel fidelity, but resulting in some break up of traces, and one trying to provide a total screen capture compromise. Let us know which display you like best (until the original data become available, as we said..)
  
 

  
 

Spectra from a representative HMDSO plasma deposit.

 
 
wide scan


 
 
C1s region


 
 
O1s region
 
 

Back to the text
-[ Figure 4 ]-[ Figures 5 & 6 ]-

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Last Update: 98/4/14

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