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Determination of the structure of HMDSO/O2 plasma deposits using high resolution XPS

Silicon 2p peak fits ("Figure 4")
Please read the introductory notes at the head of "Figure 3", if you haven't already done so.
Fig. 4(a)

Curve fit of the Si 2p envelope for a deposit formed from an HMDSO plasma.
Fig. 4(b)

Curve fit of the Si 2p envelope for a deposit formed from an HMDSO/oxygen (200 sccm) plasma.
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-[ Figure 3 ]-[ Figures 5 & 6 ]-

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