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Determination of the structure of HMDSO/O2 plasma deposits using high resolution XPS

Graphs ("Figures 5 & 6")
Please read the introductory notes at the head of "Figure 3", if you haven't already done so.
Fig. 5

Proportion of silicon in each environment - see Table 1 for detailed peak assignment.

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Fig. 6

Composition of HMDSO plasma deposits as a function of the oxygen flow into the plasma, determined by XPS and displayed as atomic ratios.
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-[ Figure 3 ]-[ Figure 4 ]-

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Last Update: 98/4/14

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