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CHANGES
IN THE Al SURFACE UPON
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Figure 1: The faceted topography of magnetron sputtered aluminium on glass RMS roughness = 6 nm. |
IntroductionThe performance of coated and bonded aluminium is dependent, at least in part, on its surface chemistry. There have been numerous publications in which XPS has used to determine the chemistry and thickness of the oxide film at the aluminium surface. It is apparent that an agreement exists on the method to calculate the oxide thickness from the clearly resolved Al2p metal and oxide components.1 However, there is no consensus on the approach for fitting the oxide and hydroxide components of the O1s, indeed some suggest that it is not advisable.2 Recently, a method based on defining the separation between the O1s and Al2p components has been developed using an oxyhydroxide standard.3 Here, we apply this curve fitting method to determination of the
hydroxyl concentration of the film formed at the surface of magnetron
sputtered aluminium (99.999%). Importantly, this sample allows us
to reliably define the age of the surface film and allows control
of the alloying elements. Future work will use this material to assess
the effect of plasma etching upon the surface chemistry of the aluminium
surface, hence an understanding of the effect of ambient storage on
the surface chemistry is important. |
ExperimentalAluminium was deposited in an argon plasma
at a power of 50 W from a magnetron sputter target for 10 minutes
to give an aluminium deposit of approximately 30 nm thickness.
No substrate (glass) was observed in any of the spectra. A base
pressure of 2.5x10-7mbar was obtained prior to the
introduction of argon (flow = 10sccm and pressure= 5.2x10-3mbar).
To minimise the through film hydration, the deposition chamber
was vented to oxygen prior to opening to the ambient atmosphere.
This was defined as zero time. The substrate was not observed
to increase above the ambient temperature during deposition. |
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Figure 2: Al2p and O1s core levels from a magnetron
sputtered aluminium exposed to the atmosphere for 23 min.
Figure 3: Proportion of O1s of component peaks
against atmospheric exposure time.
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Results and DiscussionAluminium was deposited onto glass cover slides producing a mirror
finish. The aluminium surface topography was determined by AFM to
be dominated by crystal facets of ca. 100nm lateral size (Figure 1).
This morphology was unchanged after ambient storage over the periods
considered in this work. |
Figure 4: Increase in film thickness calculated
from the Al2p metal and oxide/hydroxide ratios assuming that the volume
density ratio of aluminium in metal to that in oxide is 1.5 and the
inelastic mean free path of the photoelectrons in the film was 2.75nm
Figure 5: Carbon concentration against atmospheric
exposure time.
Figure 6: Water contact angle against atmospheric
exposure time.
The error bars are the standard deviation calculated from a number of measurements on different areas of one sample. |
The knowledge that the oxide overlays the metal allows the oxide to metal ratio area ratio, Io /Im , to be converted into a film thickness, d(nm) using equation 1:
where the inelastic mean free path (IMFP) in the oxide, |
Figure 7: Curve fitted Al2p and O1s and C1s core
levels from a magnetron sputtered aluminium sample exposed to the atmosphere
for one month at normal and shallow take off angles.
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Variable angle XPS spectra indicated that at shallower analysis depths
the hydroxyl component becomes more prominent (Figure 7). This suggests
that the proportion of hydroxyl ions at the surface of the oxide/hydroxide
film is greater than in the film. The additional information that
can be provided by application of regularisation algorithms to these
data is currently under investigation.4 |
ConclusionsThe effect of ambient storage of magnetron sputtered aluminium has been characterised. Logarithmic increases with ambient storage time of the hydroxyl concentration, film thickness, carbon concentration and water contact angle have been identified. The adsorption of atmospheric carbon was found to be the dominant factor in influencing the wettability of the surface, which became increasingly hydrophobic with time. Initial angle-resolved XPS measurements suggest that the proportion of oxygen ions in hydroxyl environments is greater at the film surface. The procedure determined elsewhere for curve fitting the O1s core level has been successfully applied to the spectra obtained herein. Satisfactory fits of the O1s envelopes were obtained using the O1s-Al2p separations previously determined. Qualitatively, sensible trends in the hydroxyl concentration are produced, however, a quantitative verification of this method has yet to be obtained. |
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References
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