AXIS Nova integrated into EUV Beam Line at TNO

Published: 
March 29th 2017

Kratos Analytical have played a pivotal role in developing the 2nd generation EUV exposure and in-situ surface analysis facility, dubbed EBL2, at TNO, Delft.  This system will give customers the opportunity to evaluate their materials/components in terms of NXE-relevant EUV irradiation and environmental conditions in order to address contamination and lifetime challenges.  Kratos have installed and commissioned an AXIS Nova with modified sample handling to interface with the automated reticule sample handling system.  The AXIS Nova is used for XPS surface of large EUV masks and pellicles including defect mapping functionality.